Inductively coupled plasma sources from Plasma ALD, LLC.


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Thomas Larrabee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Larrabee returned 3 record(s).

NumberTitle
1In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
2Plasma-Modified Atomic Layer Deposition
3Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition