Su Jeong Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Su Jeong Lee returned 3 record(s).

Number	Title
1	Growth characteristics and electrical properties of SiO₂ thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
2	Comparative study on growth characteristics and electrical properties of ZrO₂ films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
3	Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer