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N. V. Porokhov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by N. V. Porokhov returned 2 record(s).

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate