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Chih-Wei Hsu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chih-Wei Hsu returned 3 record(s).

NumberTitle
1Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
2In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
3Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition