Wei Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wei Huang returned 5 record(s).

Number	Title
1	Surface Passivation of Silicon Using HfO₂ Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
2	Chemical, optical, and electrical characterization of Ga₂O₃ thin films grown by plasma-enhanced atomic layer deposition
3	Systematic Study of the SiO_x Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiO_x/SiO₂ Super-Lattice
4	An improvement of HfO₂/Ge interface by in situ remote N₂ plasma pretreatment for Ge MOS devices
5	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD