Andrew C. Kummel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew C. Kummel returned 3 record(s).

Number	Title
1	Experimental and theoretical determination of the role of ions in atomic layer annealing
2	The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
3	Nitride passivation of the interface between high-k dielectrics and SiGe