Morteza Aghaee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Morteza Aghaee returned 3 record(s).

Number	Title
1	Area-Selective Atomic Layer Deposition of In₂O₃:H Using a µ-Plasma Printer for Local Area Activation
2	Low temperature temporal and spatial atomic layer deposition of TiO₂ films
3	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD