Nathan Nelson-Fitzpatrick Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nathan Nelson-Fitzpatrick returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of TiN for the fabrication of nanomechanical resonators |
| 2 | Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2 |