Kamira Weinfeld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kamira Weinfeld returned 6 record(s).

Number	Title
1	Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
2	Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
3	Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
4	Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
5	Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
6	Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition