Young Jae Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Young Jae Kim returned 2 record(s).

Number	Title
1	Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
2	Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization