Il-Hwan Hwang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Il-Hwan Hwang returned 3 record(s).

Number	Title
1	Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
2	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
3	High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiN_x MIS structure