Xingcun Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xingcun Li returned 4 record(s).

Number	Title
1	Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
2	Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
3	Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
4	Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources