B. L. Williams Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by B. L. Williams returned 3 record(s).

Number	Title
1	Low resistivity HfN_x grown by plasma-assisted ALD with external rf substrate biasing
2	Plasma-assisted atomic layer deposition of HfN_x: Tailoring the film properties by the plasma gas composition
3	Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges