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William J. Mitchell Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by William J. Mitchell returned 2 record(s).

NumberTitle
1Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
2The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces