Inductively coupled plasma sources from Plasma ALD, LLC.


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Satoshi Sugahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Satoshi Sugahara returned 4 record(s).

NumberTitle
1Atomic layer epitaxy of germanium
2Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
3Atomic hydrogen-assisted ALE of germanium
4Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon