Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Sami Kinnunen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sami Kinnunen returned 2 record(s).

NumberTitle
1The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
2Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films