Chenming Calvin Hu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chenming Calvin Hu returned 4 record(s).

Number	Title
1	Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO₂/In_0.53Ga_0.47As Gate-Stack
2	Plasma Enhanced Atomic Layer Deposition Passivated HfO₂/AlN/In_0.53Ga_0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
3	In_0.53Ga_0.47As FinFET and GAA-FET With Remote-Plasma Treatment
4	Electrical Characteristics of n, p-In_0.53Ga_0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer