Heungsoo Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heungsoo Park returned 3 record(s).

Number	Title
1	Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
2	Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
3	Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor