J. H. Klootwijk Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. H. Klootwijk returned 3 record(s).

Number	Title
1	Deposition of TiN and HfO₂ in a commercial 200 mm remote plasma atomic layer deposition reactor
2	Plasma and Thermal ALD of Al₂O₃ in a Commercial 200mm ALD Reactor
3	Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al₂O₃ Thin Films