Wan-Yu Wu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wan-Yu Wu returned 5 record(s).

Number	Title
1	Influence of plasma power on deposition mechanism and structural properties of MoO_x thin films by plasma enhanced atomic layer deposition
2	Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy
3	Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
4	Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO₂ Thin Films via Atomic Layer Deposition
5	Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers