Jörg Schulze Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jörg Schulze returned 2 record(s).

Number	Title
1	Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors
2	Device performance tuning of Ge gate-all-around tunneling field effect transistors by means of GeSn: Potential and challenges