Chee Wee Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chee Wee Liu returned 4 record(s).

Number	Title
1	Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
2	Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
3	Improvement in electrical characteristics of HfO₂ gate dielectrics treated by remote NH₃ plasma
4	Passivation of Al₂O₃/TiO₂ on monocrystalline Si with relatively low reflectance