Xianbin Xu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xianbin Xu returned 5 record(s).

Number	Title
1	Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
2	Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
3	Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
4	Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
5	Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources