Inductively coupled plasma sources from Plasma ALD, LLC.


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Yan Cheng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yan Cheng returned 2 record(s).

NumberTitle
1Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
2Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon