Marco Lisker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Lisker returned 3 record(s).

Number	Title
1	Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
2	Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
3	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates