Marco Lisker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Lisker returned 3 record(s).

Number	Title
1	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
3	Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds