Dmitry S. Kuzmichev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dmitry S. Kuzmichev returned 3 record(s).

Number	Title
1	In Situ Control of Oxygen Vacancies in TaO_x Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
2	Hydrogen radical enhanced atomic layer deposition of TaO_x: saturation studies and methods for oxygen deficiency control
3	Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO₂/TiN stacks