Karsten Henkel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Karsten Henkel returned 11 record(s).

Number	Title
1	Capacitance and conductance versus voltage characterization of Al₂O₃ layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
2	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
4	In situ real-time and ex situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition
5	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al₂O₃-films
6	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
7	Analysis of nitrogen species in titanium oxynitride ALD films
8	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
9	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
10	Localized defect states and charge trapping in atomic layer deposited-Al₂O₃ films
11	Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition