Luke O. Nyakiti Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Luke O. Nyakiti returned 2 record(s).

Number	Title
1	Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
2	Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition