Inductively coupled plasma sources from Plasma ALD, LLC.


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Chen Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chen Yang returned 3 record(s).

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
2ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
3ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors