Boaz Pokroy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Boaz Pokroy returned 3 record(s).

Number	Title
1	A comparison between HfO₂/Al₂O₃ nano-laminates and ternary Hf_xAl_yO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
2	A comparative study of AlN and Al₂O₃ based gate stacks grown by atomic layer deposition on InGaAs
3	Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications