Inductively coupled plasma sources from Plasma ALD, LLC.


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Jurriaan Schmitz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jurriaan Schmitz returned 3 record(s).

NumberTitle
1Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2PEALD AlN: controlling growth and film crystallinity
3Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes