Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

S. Mather Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Mather returned 2 record(s).

NumberTitle
1Hafnia and alumina on sulphur passivated germanium
2Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition