Jaeyeong Heo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaeyeong Heo returned 4 record(s).

Number	Title
1	Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS₂ anodes in Na-ion battery
2	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films
3	Influence of Substrates on the Nucleation and Growth Behaviors of Ge₂Sb₂Te₅ Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
4	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH₃/O₂ Plasma