A. S. Cavanagh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. S. Cavanagh returned 3 record(s).

Number	Title
1	Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
2	Nucleation and growth of Pt atomic layer deposition on Al₂O₃ substrates using (methylcyclopentadienyl)-trimethyl platinum and O₂ plasma
3	Electron-enhanced atomic layer deposition of silicon thin films at room temperature