Takahiro Nagata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Takahiro Nagata returned 2 record(s).

Number	Title
1	Ferroelectricity of Hf_xZr_1-xO₂ thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
2	Correlation between ferroelectricity and ferroelectric orthorhombic phase of Hf_xZr_1-xO₂ thin films using synchrotron x-ray analysis