Marco Diegel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Diegel returned 3 record(s).

Number	Title
1	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H₂/N₂ plasma
3	Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices