Inductively coupled plasma sources from Plasma ALD, LLC.


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Simarjeet S Saini Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simarjeet S Saini returned 2 record(s).

NumberTitle
1Junction-less nanowire based photodetector: Role of nanowire width
2Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys