Inductively coupled plasma sources from Plasma ALD, LLC.


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Junction-less nanowire based photodetector: Role of nanowire width

Type:
Journal
Info:
Arxiv.org Preprint
Date:
2017-07-25

Author Information

Name Institution
Anita Fadavi RoudsariUniversity of Waterloo
Iman KhodadadzadehUniversity of Waterloo
Simarjeet S SainiUniversity of Waterloo
MP AnantramUniversity of Washington
Nixon OTeledyne DALSA Inc.

Films

Plasma Al2O3

Hardware used: Unknown


Film/Plasma Properties

Substrates

Silicon

Notes

1054