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Your search for plasma enhanced atomic layer deposition publications authored by Patrick H. Carey IV returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3 |
| 2 | Band alignment of Al2O3 with (-201) β-Ga2O3 |