Chao Xia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chao Xia returned 3 record(s).

Number	Title
1	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
2	Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
3	Low-temperature plasma-enhanced atomic layer deposition of HfO₂/Al₂O₃ nanolaminate structure on Si