Inductively coupled plasma sources from Plasma ALD, LLC.


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Nadine Collaert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nadine Collaert returned 2 record(s).

NumberTitle
1Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
2Dynamic threshold voltage influence on Ge pMOSFET hysteresis