Hyun-Yong Yu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun-Yong Yu returned 2 record(s).

Number	Title
1	Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
2	Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing