Yanfei Zhao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yanfei Zhao returned 2 record(s).

Number	Title
1	Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
2	Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity