John F. Conley, Jr. Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by John F. Conley, Jr. returned 4 record(s).

Number	Title
1	Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO₂ and Ta-Based Amorphous Metals
2	Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
3	Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
4	Plasma Enhanced Atomic Layer Deposition of Al₂O₃/SiO₂ MIM Capacitors