Richard Potter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Richard Potter returned 3 record(s).

Number	Title
1	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
2	Gadolinium nitride films deposited using a PEALD based process
3	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films