Yong Ju Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong Ju Lee returned 8 record(s).

Number	Title
1	Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
2	Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
3	Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
4	Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
5	Formation of aluminum nitride thin films as gate dielectrics on Si(100)
6	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
7	Study on the characteristics of aluminum thin films prepared by atomic layer deposition
8	Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition