Dieter Schmeißer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dieter Schmeißer returned 11 record(s).

Number	Title
1	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
2	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
3	Localized defect states and charge trapping in atomic layer deposited-Al₂O₃ films
4	Analysis of nitrogen species in titanium oxynitride ALD films
5	Capacitance and conductance versus voltage characterization of Al₂O₃ layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
6	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
7	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al₂O₃-films
8	Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
9	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
10	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
11	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition