Steven Demuynck Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steven Demuynck returned 2 record(s).

Number	Title
1	Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass
2	Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes