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Sungwoo Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sungwoo Choi returned 2 record(s).

NumberTitle
1Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
2Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric