Sungwoo Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sungwoo Choi returned 2 record(s).

Number	Title
1	Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
2	Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric