Keunjun Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Keunjun Kim returned 4 record(s).

Number	Title
1	Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
2	Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
3	Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)₂ Precursor
4	Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)₂] and Dicobalt Octacarbonyl [Co₂(CO)₈]